STS Pegasus 4/Processes/LNF Oxynitride LF
|About this Process|
|Equipment||STS Pegasus 4|
|Material||Si, SiO2, Si3N4|
|Gases Used||SF6, C4F8, Ar|
|Authored By||Brian Vanderelzen|
The LNF Oxynitride LF is a legacy recipe on the STS Pegasus 4 and 6 that may be used to etch silicon dioxide and silicon nitride. Because the tool is not designed for this process, it also etches silicon and photoresist at a similar rate. It is primarily useful for native oxide removal prior to a deep Si etch. For oxide film etching, such as preparing an etch mask, the STS Glass Etcher and P5000 RIE have far superior performance and are strongly recommended. It is not actively supported by the LNF.
Follow the SOP outlined on the tool page. Run LNF Oxynitride LF for up to 20 minutes with the 1 minute automated clean recipe, longer etches should be run with the 3 minute automated clean recipe.
|Bias Pulsing||Hz||40 Hz - 80%|
|Silicon dioxide||1090 Å/min||5.1%||?|
|SPR 220||1520 Å/min||5.9%||?|
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This process is not recommended for most etch processes. There are other RIE tools in the lab with much better performance for oxide and nitride etching with higher selectivity to silicon and photoresist. Please create a helpdesk ticket or email firstname.lastname@example.org if you have further questions.