Difference between revisions of "STS Pegasus 6/Processes"
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The STS Pegasus 6 has the same processing capabilities as the [[STS Pegasus 4]]. The recipes are interchangeable and the tools are qualified and adjusted to produce results within 5% of each other after any major maintenance. Please review the list of supported processes [[STS Pegasus 4/Processes|here]]. | The STS Pegasus 6 has the same processing capabilities as the [[STS Pegasus 4]]. The recipes are interchangeable and the tools are qualified and adjusted to produce results within 5% of each other after any major maintenance. Please review the list of supported processes [[STS Pegasus 4/Processes|here]]. | ||
[[Category:DRIE processes]] | [[Category:DRIE processes]] | ||
Latest revision as of 18:53, 23 May 2021
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The STS Pegasus 6 has the same processing capabilities as the STS Pegasus 4. The recipes are interchangeable and the tools are qualified and adjusted to produce results within 5% of each other after any major maintenance. Please review the list of supported processes here.
