Difference between revisions of "STS Pegasus 6/Processes"

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(Redirected page to STS Pegasus 4/Processes)
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Revision as of 18:53, 23 May 2021

The STS Pegasus 6 has the same processing capabilities as the STS Pegasus 4. The recipes are interchangeable and the tools are qualified and adjusted to produce results within 5% of each other after any major maintenance. Please review the list of supported processes here.