September 2018 water damage
This page has been created to consolidate updates following the September 27th flood that occurred in EECS 1450 (submicron room) and 1440D/E (thin films and plasma bays). Note that the rest of the LNF spaces were not affected. Please see below for updated status.
Update as of mid day, Friday September 28th: the cleaning of EECS 1440 D/E was completed and these areas of the clean room were re-opened to users. Most of the equipment in these spaces has been evaluated and are back in operation.
EECS 1450 (submicron room) is still closed while the contractor finishes the drying process.
|GCA AS200 AutoStep||Off-line||Tech support already on site and working|
|ACS cluster tool||On-line|
|Heidelberg Mask Maker||On-line|
|LAM9400||Off-line||Waiting on replacement turbopump|
|Oxford OpAl ALD||Off-line|
|Veeco Fiji ALD||On online|
|GSI PECVD||On online|
|PT790 PECVD/RIE||Back online|
|Oxford ICP RIE||Back online|
|Enerjet evaporator||Back online|
|Cooke evaporator||Back online|
|AE evaporator||Back online|
|SJ20 evaporator||Back online|