September 2018 water damage
This page has been created to consolidate updates following the September 27th flood that occurred in EECS 1450 (submicron room) and 1440D/E (thin films and plasma bays). Note that the rest of the LNF spaces were not affected. Please see below for updated status.
Facility status
Update as of mid day, Friday September 28th: the cleaning of EECS 1440 D/E was completed and these areas of the clean room were re-opened to users. Most of the equipment in these spaces has been evaluated and are back in operation.
EECS 1450 (submicron room) is still closed while the contractor finishes the drying process.
Equipment status
| Equipment | Status | Alternatives | Comments |
|---|---|---|---|
| GCA AS200 AutoStep | Off-line | Tech support already on site and working | |
| ACS cluster tool | On-line | ||
| Heidelberg Mask Maker | On-line | ||
| MA/BA-6 | On-line | ||
| MA-6 | On-line | ||
| MJB3 #2 | On-line | ||
| IR microscope | On-line | ||
| LAM9400 | Off-line | Waiting on replacement turbopump | |
| Oxford OpAl ALD | Off-line | ||
| Veeco Fiji ALD | On online | ||
| GSI PECVD | On online | ||
| PT790 PECVD/RIE | Back online | ||
| Oxford ICP RIE | Back online | ||
| Enerjet evaporator | Back online | ||
| Cooke evaporator | Back online | ||
| AE evaporator | Back online | ||
| SJ20 evaporator | Back online | ||
| SB-6e bonder | Online | ||
| EVG510 bonder | Offline | Will be released once PCW is turned back on | |
| EVG520 bonder | Offline | Will be released once PCW is turned back on |
Alternative solutions and back up
Contact us for any urgent need - please create a Helpdesk ticket on any tool that you need and provide as much process information as possible.
