September 2018 water damage
This page has been created to consolidate updates following the September 27th flood that occurred in EECS 1450 (submicron room) and 1440D/E (thin films and plasma bays). Note that the rest of the LNF spaces were not affected. Please see below for updated status.
Update as of mid day, Wednesday October 3rd: the cleaning of EECS 1440 D/E was completed and these areas of the clean room were re-opened to users. Most of the equipment in these spaces has been evaluated and are back in operation.
EECS 1450 (submicron room) has been cleaned, particle count tested and is open to users.
|GCA AS200 AutoStep||On-line||Global alignment calibration is currently less stable due to environmental chamber, µDFAS however is working well|
|ACS cluster tool||On-line|
|Heidelberg Mask Maker||On-line|
|Oxford OpAl ALD||Off-line|
|Veeco Fiji ALD||On-line|
|Oxford ICP RIE||On-line|