September 2018 water damage

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This page has been created to consolidate updates following the September 27th flood that occurred in EECS 1450 (submicron room) and 1440D/E (thin films and plasma bays). Note that the rest of the LNF spaces were not affected. Please see below for updated status.

Facility status

Update as of mid day, Wednesday October 3rd: the cleaning of EECS 1440 D/E was completed and these areas of the clean room were re-opened to users. Most of the equipment in these spaces has been evaluated and are back in operation.
EECS 1450 (submicron room) has been cleaned, particle count tested and is open to users.

Equipment status

Equipment Status Alternatives Comments
GCA AS200 AutoStep On-line Global alignment calibration is currently less stable due to environmental chamber, µDFAS however is working well
ACS cluster tool On-line
Heidelberg Mask Maker On-line
MA/BA-6 On-line
MA-6 On-line
MJB3 #2 On-line
IR microscope On-line
LAM9400 On-line
Oxford OpAl ALD Off-line
Veeco Fiji ALD On-line
GSI PECVD On-line
PT790 PECVD/RIE On-line
Oxford ICP RIE On-line
Enerjet evaporator On-line
Cooke evaporator On-line
AE evaporator On-line
SJ20 evaporator On-line
SB-6e bonder On-line
EVG510 bonder On-line
EVG520 bonder On-line

Alternative solutions and back up

Contact us for any urgent need - please create a Helpdesk ticket on any tool that you need and provide as much process information as possible.