September 2018 water damage
This page has been created to consolidate updates following the September 27th flood that occurred in EECS 1450 (submicron room) and 1440D/E (thin films and plasma bays). Note that the rest of the LNF spaces were not affected. Please see below for updated status.
Facility status
Update as of mid day, Wednesday October 3rd: the cleaning of EECS 1440 D/E was completed and these areas of the clean room were re-opened to users. Most of the equipment in these spaces has been evaluated and are back in operation.
EECS 1450 (submicron room) has been cleaned, particle count tested and is open to users.
Equipment status
| Equipment | Status | Alternatives | Comments |
|---|---|---|---|
| GCA AS200 AutoStep | On-line | Global alignment calibration is currently less stable due to environmental chamber,
µDFAS however is working well. (make a ticket if you need assistance) | |
| ACS cluster tool | On-line | ||
| Heidelberg Mask Maker | On-line | ||
| MA/BA-6 | On-line | ||
| MA-6 | On-line | ||
| MJB3 #2 | On-line | ||
| IR microscope | On-line | ||
| LAM9400 | On-line | ||
| Oxford OpAl ALD | Off-line | ||
| Veeco Fiji ALD | On-line | ||
| GSI PECVD | On-line | ||
| PT790 PECVD/RIE | On-line | ||
| Oxford ICP RIE | On-line | ||
| Enerjet evaporator | On-line | ||
| Cooke evaporator | On-line | ||
| AE evaporator | On-line | ||
| SJ20 evaporator | On-line | ||
| SB-6e bonder | On-line | ||
| EVG510 bonder | On-line | ||
| EVG520 bonder | On-line |
Alternative solutions and back up
Contact us for any urgent need - please create a Helpdesk ticket on any tool that you need and provide as much process information as possible.
