Difference between revisions of "Silicon"

From LNF Wiki
Jump to navigation Jump to search
Line 27: Line 27:
 
*Deposition
 
*Deposition
 
**[[Lab 18-1]]
 
**[[Lab 18-1]]
 +
====Amorphous silicon====
 +
**[[P5000 PECVD]]
 +
**[[Plasmatherm 790]]
 
====Poly silicon====
 
====Poly silicon====
 
**[[Tempress S3T3 - Flat Poly-Si 4"]]
 
**[[Tempress S3T3 - Flat Poly-Si 4"]]

Revision as of 10:18, 26 September 2017

Warning Warning: This page has not been released yet.


Silicon
Material Details
Material Restriction Undefined


Silicon is a Group IV elemental semiconductors. It's an indirect band gap material rated at 1.12eV.

Applications

Silicon

Amorphous silicon (a-Si)

Polycrystalline silicon

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Equipment

Amorphous silicon

Poly silicon

Doped Poly silicon

References

Wikipedia Page