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Silicon is a Group IV elemental semiconductors. It's an indirect band gap material rated at 1.12eV.

Contents

Applications

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections. Please keep in mind that for segregations reasons, plasma tools and funaces only can accept prime grade silicon wafers.

Equipment

Amorphous silicon

Poly silicon

Doped Poly silicon

References