Silicon

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Silicon
Material Details
Material Restriction	Undefined

A description & relevant information for this material need to be added.

Applications

Discuss common uses/applications for this material.

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Equipment

• Etching
  • STS Pegasus 4
  • STS Pegasus 6
• Deposition
  • Lab 18-1
  • Tempress S1T3 - P-type in Situ Doped Poly-Si 4”
  • Tempress S1T3 - N-type in Situ Doped Poly-Si 6”
  • Tempress S3T3 - Flat Poly-Si 4”
  • Tempress S6T3 - Flat Poly-Si 4”

Processes

• List of chemical (or otherwise) processes for this material

References

Wikipedia Page