Silicon

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Silicon is a Group IV elemental semiconductors. It's an indirect band gap material rated at 1.12eV.

Applications

Silicon

Amorphous silicon (a-Si)

Polycrystalline silicon

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections. Please keep in mind that for segregations reasons, plasma tools and funaces only can accept prime grade silicon wafers.

Etching Equipment

• DRIE
  • STS Pegasus 4
  • STS Pegasus 6
• RIE
  • P5000 RIE
  • LAM 9400
  • Plasmatherm 790

Deposition Equipment

• Amorphous silicon
  • P5000 PECVD
• Poly silicon
  • Tempress S3T3 - Flat Poly-Si 4"
  • Tempress S6T3 - Flat Poly-Si 4"
• Doped Poly silicon
  • Tempress S1T3 - N-type in Situ Doped Poly-Si 6"
  • Tempress S3T4 - N-type in Situ Doped Poly-Si 4"
  • Tempress S4T3 - Flat Poly 6"
• Sputtered
  • Lab 18-1

References

Wikipedia Page