Difference between revisions of "Silicon dioxide"

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===Equipment===
 
===Equipment===
** [[Lab 18-1|Lab 18-1]]
+
 
** [[PVD 75 Proline|PVD 75]]
+
*Low temperature deposition
 +
**[[Lab 18-1|Lab 18-1]]
 +
**[[PVD 75 Proline|PVD 75]]
 +
**[[Angstrom Engineering Evovac Evaporator]]
 +
**[[SJ-26 Evaporator]]
 +
*Medium temperature deposition
 +
**[[Veeco Fiji ALD]]
 +
**[[P5000 PECVD]]
 +
**[[GSI PECVD]]
 +
**[[Plasmatherm 790]]
 +
**[[Tempress S1T2 - LTO 4"]]
 +
**[[Tempress S1T4 - LTO 6"]]
 +
*High temperature deposition
 +
**[[Tempress S4T4 - TEOS 4"]]
 +
**[[Tempress S2T2 - Nitride-HTO 6"]]
 +
**[[Tempress S2T3 - Nitride-HTO-OxyNitride 4"]]
 +
**[[Tempress S3T1 - Dry Oxide]]
 +
**[[Tempress S3T2 - Wet Oxide]]
 +
**[[Tempress S5T2 - Phosphorous Anneal Oxidation]]
 +
**[[Tempress S5T4 - Boron Anneal Oxidation]]
  
 
===Processes===
 
===Processes===
* [[Chemical vapor deposition|Chemical Vapor Deposition (CVD)]]
+
 
 +
*[[Chemical vapor deposition|Chemical Vapor Deposition (CVD)]]
 
**[[Atomic_layer_deposition|Atomic Layer Deposition (ALD)]]
 
**[[Atomic_layer_deposition|Atomic Layer Deposition (ALD)]]
 
**[[Low_pressure_chemical_vapor_deposition|Low-Pressure Chemical Vapor Deposition (LPCVD)]]
 
**[[Low_pressure_chemical_vapor_deposition|Low-Pressure Chemical Vapor Deposition (LPCVD)]]
 
**[[PECVD|Plasma Enhanced Chemical Vapor Deposition (PECVD)]]
 
**[[PECVD|Plasma Enhanced Chemical Vapor Deposition (PECVD)]]
  
* [[Physical vapor deposition]] (PVD)
+
*[[Physical vapor deposition]] (PVD)
 
**[[Electron_beam_evaporation|E-beam evaporation]]
 
**[[Electron_beam_evaporation|E-beam evaporation]]
 
**[[Sputter_deposition|Sputter deposition]]
 
**[[Sputter_deposition|Sputter deposition]]
  
 
====Deposition Processes====
 
====Deposition Processes====
* List of chemical (or otherwise) processes for this material
+
 
 +
*List of chemical (or otherwise) processes for this material
  
 
====Etch Processes====
 
====Etch Processes====
* List of chemical (or otherwise) processes for this material
+
 
 +
*List of chemical (or otherwise) processes for this material
  
 
==Applications==
 
==Applications==
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{Incoming}
 
{Incoming}
 
'''External References:'''
 
'''External References:'''
 +
 
*Citations/references for this material
 
*Citations/references for this material

Revision as of 11:55, 25 February 2020

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Description

A description & relevant information for this material need to be added.

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Equipment

Processes

Deposition Processes

  • List of chemical (or otherwise) processes for this material

Etch Processes

  • List of chemical (or otherwise) processes for this material

Applications

Discuss common uses/applications for this material.

References

Internal References: {Incoming} External References:

  • Citations/references for this material