Difference between revisions of "Silicon dioxide"
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* [[Physical vapor deposition]] (PVD) | * [[Physical vapor deposition]] (PVD) | ||
**[[Electron_beam_evaporation|E-beam evaporation]] | **[[Electron_beam_evaporation|E-beam evaporation]] | ||
− | **[[Sputter_deposition|Sputter deposition] | + | **[[Sputter_deposition|Sputter deposition]] |
====Deposition Processes==== | ====Deposition Processes==== |
Revision as of 09:11, 10 July 2019
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Contents
Description
A description & relevant information for this material need to be added.
Processing Tools
Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.
Equipment
Processes
Deposition Processes
- List of chemical (or otherwise) processes for this material
Etch Processes
- List of chemical (or otherwise) processes for this material
Applications
Discuss common uses/applications for this material.
References
Internal References: {Incoming} External References:
- Citations/references for this material