Silicon dioxide

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Contents

Description

A description & relevant information for this material need to be added.

Processing Tools

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Equipment

• • Lab 18-1
  • PVD 75

Processes

• Chemical Vapor Deposition (CVD)
  • Atomic Layer Deposition (ALD)
  • Low-Pressure Chemical Vapor Deposition (LPCVD)
  • Plasma Enhanced Chemical Vapor Deposition (PECVD)

• Physical vapor deposition (PVD)
  • E-beam evaporation
  • Sputter deposition

Deposition Processes

• List of chemical (or otherwise) processes for this material

Etch Processes

• List of chemical (or otherwise) processes for this material

Applications

Discuss common uses/applications for this material.

References

Internal References: {Incoming} External References:

• Citations/references for this material