Solitec Spinner
The Solitec Spinner is a manual photoresist spinner located in the ROBIN lab. It is used primarily for soft lithography, and is interlocked with Solvent Bench 94. Solvent Bench 94 must be reserved in order to use the Solitec Spinner.
| Solitec Spinner | |
|---|---|
 | |
| Equipment Details | |
| Technology | Lithography |
| Materials Restriction | Metals |
| Sample Size | sample sizes up to 6" diameter |
| Chemicals Used | photoresists, polyimides, PDMS, others with approval |
| Equipment Manual | |
| Overview | System Overview |
| Operating Procedure | SOP |
| Supported Processes | Supported Processes |
| User Processes | User Processes |
| Maintenance | Maintenance |
Announcements
This spinner has been decommissioned and replaced by the new Laurell Spinner