Solitec Spinner

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Solitec Spinner
Equipment Details
Technology Lithography
Materials Restriction Metals
Sample Size sample sizes up to 6" diameter
Chemicals Used photoresists, polyimides, PDMS, others with approval
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance

The Solitec Spinner is a manual photoresist spinner located in the ROBIN lab. It is used primarily for soft lithography, and is interlocked with Solvent Bench 94. Solvent Bench 94 must be reserved in order to use the Solitec Spinner.


This spinner has been decommissioned and replaced by the new Laurell Spinner