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The Solvent 14 Bench is for working with solvents, for stripping resist, cleaning wafers, and Lift-off. It is considered a non CMOS-clean bench, so wafers with metal are allowed in the bench. It is intended for use with 4" and 6" Si and glass substrates only. If you need to use solvents to clean a CMOS-clean device, please make a Helpdesk ticket and staff can help to coordinate this.

Solvent Bench 14
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Solvent Bench 14
Equipment Details
Technology Wet bench
Materials Restriction Metals
Material Processed silicon and glass wafers
Sample Size 4" and 6"
Chemicals Used Remover PG, Acetone, IPA, 1165
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes
Maintenance Maintenance[LNF_User:Solvent Bench 14_User_Processes|User Processes]]



Contents

Announcements

In both the Cleanroom and the Robin Lab, the LNF has updated the personal protective equipment policy at Solvent Benches. In addition to the mandatory chemical safety glasses, face shields are now recommended to be worn when possibility exists for eye contact due to splashing/spraying liquid.

System Overview

Chemicals Allowed

Hardware Details

This bench contains 2 heated ultrasonic baths, 2 hotplates with digital solution readout, a heated megasonic tank, DI Quick Dump Rinse tank (QDR), timers, and there are 2 aspirators on this bench, one goes to solvent waste, the other to the acid waste neutralization system.

Safety

Proper PPE for this bench are Trionic or Neoprene gloves and safety glasses. If the possiblity exists for splashing/ spraying please wear a faceshield
  Warning: You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Many solvents are very carcinogenic so avoid contact and breathing the vapors. To minimize the chance of accident, make sure you always:

  • Wear personal protective equipment. Required PPE at this bench are safety glasses and either Trionic or Neoprene gloves.
  • LNF Glove Policy
  • Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
  • Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
  • Only process 4” and 6” wafers.
  • Do not use this bench without proper training.
  • There are three routes of disposal from this bench:
    • Solvent Aspirator: Only solvents can be disposed of using this aspirator. Do not aspirate water with this aspirator.
    • Water Aspirator: Only water can be disposed of using this aspirator. Do not aspirate solvents with this aspirator.
    • Solvent drain: Solvents can be poured down the solvent drain where they are collected in the basement. Do not pour water or non-solvents into this drain.

Substrate Requirements

  • 4 and 6 inch wafers
  • Glass and Silicon

Material Restrictions

The Solvent Bench 14 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Standard Operating Procedure

SOP


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Checkout Procedure

The quiz for Solvent Bench 14 also includes checkout Solvent Bench 84, and Solvent Bench 83. Please be prepared for this when you reach steps 5 and 6.

  1. Take the General Wet Bench Training, if you haven't already.
  2. Read through this page and the Standard Operating Procedure above.
  3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  4. Fill out the Process Information Form
  5. Open a helpdesk ticket and request a checkout.
  6. A tool engineer will schedule a time for checkout.
  7. Complete the Cleanroom Solvent Bench quiz.
  8. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

Benches are checked twice a week during lab clean. The solvent drain filter is cleaned out then.

User Maintenance

Broken DI Gun

Turn off the water inlet in the back service aisle

Broken N2 Gun

Turn off the nitrogen inlet in the back service aisle

Ground Fault

Maintenance on the wet benches should only be done if you have been trained and are comfortable doing it. Read through the procedure and follow the instructions. If you are unsure, create a helpdesk ticket and the staff will determine the repairs necessary for the tool the next business day. The procedures are described below. Widget text will go here.