Solvent Bench 83

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Solvent Bench 83
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Solvent Bench 83
Equipment Details
Technology Wet bench
Materials Restriction Metals
Material Processed All types of wafer and pieces
Sample Size from 1cm pieces to 6" wafers
Chemicals Used Isopropanol, Acetone, PRS 2000, Methanol
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Supported Processes
User Processes User Processes


The Solvent Bench 83 is for working with solvents, stripping resist, and cleaning wafers. It is considered a non CMOS-clean bench, so wafers with metal are allowed in the bench. It is intended for use with all sized wafers and materials.

Warning Warning: If you use this bench for stripping photoresist you will not be allowed to return to CMOS clean or semi-clean tools

Announcements

In both the Cleanroom and the Robin Lab, the LNF has updated the personal protective equipment policy at Solvent Benches. In addition to the mandatory chemical safety glasses, face shield are now recommended to be worn when possibility exists for eye contact due to splashing/spraying liquid.

System overview

Chemicals allowed

Hardware details

This bench contains a dedicated PRS 2000 bath, a DI Rinse tank, and an aspirators on this bench that goes to solvent waste carboy.

Safety

Proper PPE for this bench are Trionic or Neoprene gloves and safety glasses. If the possibility exists for splashing/ spraying, please wear a faceshield
Warning Warning: You must use the buddy system for all chemical processing. No processing if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Many solvents are very carcinogenic so avoid contact and breathing the vapors. To minimize the chance of accident, make sure you always:

  • Wear personal protective equipment. Required PPE at this bench are safety glasses and Trionic or Neoprene gloves.
  • LNF Glove Policy
  • Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
  • Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
  • Do not use this bench without proper training.
  • Solvent Aspirator: Only solvents can be disposed of using this aspirator. Do not aspirate water with this aspirator.
    • Water waste goes in the tank on the front left side of the bench. Rinse all labware and pour the water waste into this. Do NOT aspirate

Substrate requirements

All sizes and materials accomodated

Material restrictions

The Solvent Bench 83 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes

There is one main process for this tool supported by the LNF, which is described in more detail below.

Widget text will go here.


Standard operating procedure

For a reader friendly version of the SOP: here For a document version of the SOP, see below Widget text will go here.

Checkout procedure

The quiz for Solvent Bench 83 also includes checkout Solvent Bench 84, and Solvent Bench 14. Please be prepared for this when you reach steps 5 and 6.

  1. Take the General Wet Bench Training, if you haven't already.
  2. Read through this page and the Standard Operating Procedure above.
  3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
  4. Fill out Process Information Form
  5. Open a Helpdesk Ticket and request a checkout.
  6. A tool engineer will schedule a time for checkout.
  7. Complete the Cleanroom Solvent Bench quiz.
  8. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

Create a Helpdesk Ticket if the bench needs maintenance