Solvent Bench 84

Solvent Bench 84
Solvent Bench 84
Equipment Details
Technology	Wet chemical processing
Materials Restriction	Metals
Material Processed	All types of wafers
Sample Size	from 1 cm pieces to 6" wafers
Chemicals Used	Remover PG, Acetone, IPA[IPA]], Methanol
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
User Processes	User Processes
Maintenance	Maintenance[LNF_User:Solvent Bench 84_User_Processes|User Processes]]

The Solvent 84 Bench is for working with solvents, stripping resist, cleaning wafers, and lift-off. It is considered a non CMOS-clean bench, so wafers with metal are allowed in the bench. It is intended for use with 1 cm pieces up to 6 inch wafers and all materials.

Announcements

In both the Cleanroom and the Robin Lab, the LNF has updated the personal protective equipment policy at Solvent Benches. In addition to the mandatory chemical safety glasses, face shields are now recommended to be worn when possibility exists for eye contact due to splashing/spraying liquid.

System Overview

Chemicals Allowed

• IPA
• Acetone
• Remover PG
• Methanol
• Waferbond Remover Private stock
• PRS 2000 Private stock
• Xylenes Stored in 1440C Passthrough

Hardware Details

This bench contains 3 heated ultrasonic baths, DI Quick Dump Rinse tank (QDR), timers, and there is an aspirators on this bench that goes to solvent waste, a tank that goes to the acid waste neutralization system, and a bottle drying setup.

Safety

Proper PPE for this bench are Trionic or Neoprene gloves and safety glasses. If the possibility for splashing/ spraying is present, please wear a faceshield

Warning:

You must use the buddy system for all chemical processing. Do not process if you are alone in the lab. If the yellow warning lights are on it means that there are 2 or 1 people in the lab.

Working with chemicals can be very dangerous. Many solvents are very carcinogenic so avoid contact and breathing the vapors. To minimize the chance of accident, make sure you always:

• Wear personal protective equipment. Required PPE at this bench are safety glasses and Trionic or Neoprene gloves.
• LNF Glove Policy
• Know the properties and hazards of chemicals you are working with. If you don’t know, find out by reading about them or asking staff.
• Plan the details of your process. Before you start working, plan what quantities of chemicals and sample carriers you will use. Plan how you will rinse your sample and what you will do with any waste generated. Make sure you know how the controllers work.
• Do not use this bench without proper training.

• There are two routes of disposal from this bench based upon material:
  • Solvent aspirator: Only solvents can be disposed of using this aspirator. DO NOT aspirate water with this aspirator.
  • Water waste tank: Only water can be disposed of down the drain. DO NOT pour solvents into this tank.

Substrate Requirements

All sizes and materials accomodated

Material Restrictions

The Solvent Bench 84 is designated as a Metals class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Standard Operating Procedure

Widget text will go here.

Checkout Procedure

Checkout on Solvent Bench 84 can also includes checkout on Solvent Bench 14, and Solvent Bench 83. Please be prepared for this when you reach steps 5 and 6.

1. Take the General Wet Bench Training, if you haven't already.
2. Read through this page and the Standard Operating Procedure above.
3. Practice with your mentor or another authorized user until you are comfortable with tool operation.
4. Fill out Process Information Form
5. Complete the Cleanroom Solvent Bench quiz.
6. Open a helpdesk ticket and request a checkout.
7. A tool engineer will schedule a time for checkout.
8. If you pass the quiz the tool engineer will authorize you on the tool. If not you will be contacted to repeat.

Maintenance

The bench is checked during lab clean Mondays and Thursdays.

User Supported Maintenance

Ground Fault

Maintenance on the wet benches should only be done if you have been trained and are comfortable doing it. Read through the procedure and follow the instructions. If you are unsure, create a helpdesk ticket and the staff will determine the repairs necessary for the tool the next business day. The procedures are described below. Widget text will go here.