Difference between revisions of "Solvent Bench 94/Processes"

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* SU-8 Photolithography
 
* SU-8 Photolithography
 
*: SU-8 is a negative, epoxy-based photoresist manufactured by MicroChem.  It is commonly used to make PDMS molds for microfluidics and other applications.  Several different series are available, and in each series, SU-8 is available in a range of viscosities.  The LNF provides several viscosities of the SU-8 2000 series. Product datasheets are available here:  [http://www.microchem.com/pdf/SU-82000DataSheet2000_5thru2015Ver4.pdf] [http://www.microchem.com/pdf/SU-82000DataSheet2100and2150Ver5.pdf]
 
*: SU-8 is a negative, epoxy-based photoresist manufactured by MicroChem.  It is commonly used to make PDMS molds for microfluidics and other applications.  Several different series are available, and in each series, SU-8 is available in a range of viscosities.  The LNF provides several viscosities of the SU-8 2000 series. Product datasheets are available here:  [http://www.microchem.com/pdf/SU-82000DataSheet2000_5thru2015Ver4.pdf] [http://www.microchem.com/pdf/SU-82000DataSheet2100and2150Ver5.pdf]
* PDMS Molding
+
* [https://docs.google.com/document/d/1nLQS2AXEWX3MISWfj191QWd_zvJPhPvusSqXRn192KQ/preview PDMS SOP|PDMS Molding]]
*: Polydimethylsiloxane (PDMS) is used to make microfluidics devices.  The LNF provides Sylgard 184 silicone elastomer made by Dow Corning. This SOP describes the procedure for PDMS mixing and molding: [https://docs.google.com/document/d/1nLQS2AXEWX3MISWfj191QWd_zvJPhPvusSqXRn192KQ/preview PDMS SOP]
+
*: Polydimethylsiloxane (PDMS) is used to make microfluidics devices.  The LNF provides Sylgard 184 silicone elastomer made by Dow Corning. This SOP describes the procedure for PDMS mixing and molding:  
 
* [https://docs.google.com/document/d/1k5Xi8Y1J4o0OwM6DJzn3Y3wFe_0H84kRiqU1-VJ_P1M/preview Temporary Bonding SOP]
 
* [https://docs.google.com/document/d/1k5Xi8Y1J4o0OwM6DJzn3Y3wFe_0H84kRiqU1-VJ_P1M/preview Temporary Bonding SOP]
 
*: This SOP explains temporary bonding of a sample to a carrier wafer with beeswax for lapping or polishing.
 
*: This SOP explains temporary bonding of a sample to a carrier wafer with beeswax for lapping or polishing.

Revision as of 13:39, 26 September 2016

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This page lists the processes supported by the LNF for the Solvent Bench 94.

Process List

  • SU-8 Photolithography
    SU-8 is a negative, epoxy-based photoresist manufactured by MicroChem. It is commonly used to make PDMS molds for microfluidics and other applications. Several different series are available, and in each series, SU-8 is available in a range of viscosities. The LNF provides several viscosities of the SU-8 2000 series. Product datasheets are available here: [1] [2]
  • PDMS SOP|PDMS Molding[Solvent Bench 94]]
    Polydimethylsiloxane (PDMS) is used to make microfluidics devices. The LNF provides Sylgard 184 silicone elastomer made by Dow Corning. This SOP describes the procedure for PDMS mixing and molding:
  • Temporary Bonding SOP
    This SOP explains temporary bonding of a sample to a carrier wafer with beeswax for lapping or polishing.