Solvent Bench 94/Processes

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This page lists the processes supported by the LNF for the Solvent Bench 94.

Process List

  • SU-8 Photolithography
    SU-8 is a negative, epoxy-based photoresist manufactured by MicroChem. It is commonly used to make PDMS molds for microfluidics and other applications. Several different series are available, and in each series, SU-8 is available in a range of viscosities. The LNF provides several viscosities of the SU-8 2000 series. Product datasheets are available here: [1] [2]
  • PDMS Molding
    This SOP describes the procedure for PDMS mixing and molding. Polydimethylsiloxane (PDMS) is used to make microfluidics devices. The LNF provides Sylgard 184 silicone elastomer made by Dow Corning.
  • Temporary Bonding SOP
    This SOP explains temporary bonding of a sample to a carrier wafer with beeswax for lapping or polishing.