User contributions
30 March 2022
STS APS DGRIE/Processes/LNF Polymer
no edit summary
+848
STS APS DGRIE/Processes/LNF Polymer
Etch Rates
+32
STS APS DGRIE/Processes/LNF Polymer
Etch Rates
+99
29 March 2022
20 December 2021
6 December 2021
12 November 2021
10 November 2021
5 November 2021
26 October 2021
25 October 2021
15 October 2021
YES-310TA
User authorized maintenance
+26
YES-310TA
Material restrictions
+102
YES-310TA
Substrate requirements
+66
YES-310TA
no edit summary
YES-310TA
Supported processes
+294
14 October 2021
YES-310TA
no edit summary
+2
YES-310TA
no edit summary
-147
YES-310TA
Standard operating procedure
+101
YES-310TA
Checkout procedure
+74
24 September 2021
20 September 2021
12 August 2021
30 July 2021
CEE 200X photoresist spinner 2
no edit summary
+419
CEE 200X photoresist spinner 1
Checkout procedure
+420
27 July 2021
16 July 2021
24 May 2021
YES-CV200RFS(E)
Hardware Details
YES-CV200RFS(E)
Maintenance
+16
YES-CV200RFS(E)
Standard operating procedure
-298
YES-CV200RFS(E)
Material restrictions
+1,951
23 May 2021
STS Pegasus 6/Processes
no edit summary
-34
STS Pegasus 6/Processes
Redirected page to STS Pegasus 4/Processes
+39
STS APS DGRIE
Supported processes
+212
STS Pegasus 4/Processes
no edit summary
+212
STS Pegasus 6
Supported processes
+72
STS Pegasus 4
Supported processes
+72
Nanoquest II Ion Mill
Supported processes
+212
P5000 RIE
Supported Processes
+212
Nanoquest II Ion Mill
Checkout procedure
-93
P5000 RIE
no edit summary
+139
STS APS DGRIE
Checkout procedure
+139
STS Pegasus 6
Checkout procedure
+13
STS Pegasus 4
Checkout procedure
+13
1 May 2021
STS Pegasus 4/Processes/LNF O2 Descum
no edit summary
+30
STS Pegasus 4/Processes/LNF Si Thinning 2
no edit summary
+5
STS Pegasus 4/Processes/LNF Si Thinning 1
no edit summary
+5