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- 07:46, 19 March 2021 diff hist +43 STS Pegasus 4/Processes/LNF Switched Poly current
- 07:44, 19 March 2021 diff hist +258 STS Pegasus 4/Processes/LNF Switched Poly
- 18:37, 15 March 2021 diff hist +49 STS Pegasus 4 →Material restrictions
- 18:35, 15 March 2021 diff hist +384 N File:Etch material layers.png Diagram of typical layer stack for an etching process. The top layer is the ''mask'' (for defining the pattern). Beneath is the film to be ''etched''. If the etch reaches the end of this film, the underlying layer is the ''etch stop''. Finally, any material that will not be exposed at any point during the etch is considered ''buried''. current
- 18:32, 15 March 2021 diff hist +40 STS Pegasus 4 →Material restrictions
- 18:26, 15 March 2021 diff hist +2,548 STS Pegasus 4 →Material restrictions
- 18:18, 15 March 2021 diff hist 0 STS Pegasus 4
- 18:15, 15 March 2021 diff hist +643 STS Pegasus 4 →Substrate Requirements
- 18:09, 15 March 2021 diff hist -101 STS Pegasus 4
- 18:03, 15 March 2021 diff hist +74 STS Pegasus 4 →Checkout Procedure
- 14:29, 15 March 2021 diff hist +50 STS Pegasus 4/Processes/LNF Recipe 4 current
- 09:27, 11 March 2021 diff hist +25 User Resources →Virtual training modules
- 10:39, 9 March 2021 diff hist +466 Sample mounting
- 15:24, 1 March 2021 diff hist +64 STS Pegasus 4/Processes/LNF Recipe 3
- 15:23, 1 March 2021 diff hist +111 STS Pegasus 4/Processes/LNF Recipe 2
- 15:22, 1 March 2021 diff hist +21 STS Pegasus 4/Processes/LNF Recipe 1
- 15:19, 1 March 2021 diff hist 0 STS Pegasus 4/Processes/LNF Recipe 1 →Mask Selectivity
- 15:19, 1 March 2021 diff hist +101 STS Pegasus 4/Processes/LNF Recipe 1 →Mask Selectivity
- 15:13, 1 March 2021 diff hist -13 STS Pegasus 4/Processes/LNF Si Thinning 2
- 15:10, 1 March 2021 diff hist -50 STS Pegasus 4/Processes/LNF Si Thinning 1
- 15:09, 1 March 2021 diff hist +132 STS Pegasus 4/Processes/LNF Si Thinning 1
- 15:04, 1 March 2021 diff hist +18 STS Pegasus 4/Processes/LNF Unswitched Poly →Etch profile
- 15:03, 1 March 2021 diff hist +130 N File:STS Pegasus 4 Unswitched Poly 1 um.jpg Isolated trench etched using LNF_Switched_poly in the STS Pegasus 4 for 1 min. current
- 15:02, 1 March 2021 diff hist +341 STS Pegasus 4/Processes/LNF Unswitched Poly
- 14:50, 1 March 2021 diff hist -51 STS Pegasus 4/Processes/LNF Switched Poly
- 14:49, 1 March 2021 diff hist -11 STS Pegasus 4/Processes/LNF Switched Poly
- 14:48, 1 March 2021 diff hist +130 N File:STS Pegasus 4 Switched Poly 1 um.jpg Isolated trench etched using LNF_Switched_poly in the STS Pegasus 4 for 2 min. current
- 14:45, 1 March 2021 diff hist +163 STS Pegasus 4/Processes/LNF Switched Poly
- 14:38, 1 March 2021 diff hist +393 STS Pegasus 4/Processes/LNF Switched Poly →Capabilities
- 11:57, 1 March 2021 diff hist 0 STS Pegasus 4 →Standard Operating Procedure
- 14:41, 12 February 2021 diff hist -53 EVG 510
- 19:35, 11 February 2021 diff hist +153 STS Pegasus 4/Processes
- 19:27, 11 February 2021 diff hist +75 STS Pegasus 4/Processes/LNF Oxynitride LF →Etch rate current
- 19:25, 11 February 2021 diff hist +309 STS Pegasus 4/Processes/LNF Oxynitride LF
- 15:06, 11 February 2021 diff hist -30 STS Pegasus 4/Processes/LNF Ar Descum current
- 15:05, 11 February 2021 diff hist +13 STS Pegasus 4/Processes/LNF O2 Descum
- 15:04, 11 February 2021 diff hist -49 STS Pegasus 4/Processes/LNF O2 Descum
- 15:04, 11 February 2021 diff hist +1 STS Pegasus 4/Processes/LNF O2 Descum →Etch rate and uniformity
- 14:56, 11 February 2021 diff hist +178 STS Pegasus 4/Processes/LNF O2 Descum
- 14:54, 11 February 2021 diff hist +185 STS Pegasus 4/Processes/LNF Ar Descum →Etch rate and uniformity
- 09:16, 2 February 2021 diff hist +72 YES-CV200RFS(E)
- 09:40, 8 January 2021 diff hist +78 EVG 520IS →Hardware Details
- 11:49, 17 December 2020 diff hist +43 YES-310TA
- 10:05, 17 December 2020 diff hist -392 Nanoquest II Ion Mill
- 13:20, 23 November 2020 diff hist +68 STS Pegasus 4/Processes/LNF Si Thinning 2
- 13:18, 23 November 2020 diff hist +2 STS Pegasus 4/Processes/LNF Si Thinning 2 →Mask selectivity
- 13:18, 23 November 2020 diff hist +1 STS Pegasus 4/Processes/LNF Si Thinning 1 →Mask selectivity
- 15:33, 22 November 2020 diff hist +6 STS Pegasus 4/Processes/LNF Oxynitride LF →Parameters
- 15:31, 22 November 2020 diff hist +31 STS Pegasus 4/Processes/LNF O2 Descum →Parameters
- 12:50, 22 November 2020 diff hist +13 STS Pegasus 4/Processes/LNF Ar Descum →Parameters
- 12:48, 22 November 2020 diff hist +10 STS Pegasus 4/Processes/LNF Si Thinning 2 →Parameters
- 12:46, 22 November 2020 diff hist +165 STS Pegasus 4/Processes/LNF Si Thinning 1 →Parameters
- 12:40, 22 November 2020 diff hist +37 STS Pegasus 4/Processes/LNF Unswitched Poly →Parameters
- 12:38, 22 November 2020 diff hist -1 STS Pegasus 4/Processes →Other silicon etch recipes
- 12:38, 22 November 2020 diff hist +7 STS Pegasus 4/Processes/LNF Recipe 4 →Recipe Parameters
- 12:37, 22 November 2020 diff hist -2 m STS Pegasus 4/Processes/LNF Recipe 3 →Recipe Parameters
- 12:37, 22 November 2020 diff hist +45 STS Pegasus 4/Processes/LNF Recipe 3 →Recipe Parameters
- 12:36, 22 November 2020 diff hist +45 STS Pegasus 4/Processes/LNF Recipe 2 →Parameters
- 12:36, 22 November 2020 diff hist 0 m STS Pegasus 4/Processes/LNF Recipe 1 →Parameters
- 12:35, 22 November 2020 diff hist +45 STS Pegasus 4/Processes/LNF Recipe 1 →Parameters
- 12:35, 22 November 2020 diff hist +45 STS Pegasus 4/Processes/LNF Switched Poly →Parameters
- 12:34, 22 November 2020 diff hist -5 STS Pegasus 4/Processes/LNF Switched Poly →Parameters
- 12:30, 22 November 2020 diff hist +1 STS Pegasus 4/Processes/LNF Recipe 4 →Recipe Parameters
- 12:29, 22 November 2020 diff hist +88 STS Pegasus 4/Processes/LNF Recipe 4 →Recipe Parameters
- 12:25, 22 November 2020 diff hist +4 m STS Pegasus 4/Processes/LNF Recipe 2 →Parameters
- 20:45, 19 November 2020 diff hist +7 STS Pegasus 4/Processes
- 20:44, 19 November 2020 diff hist +5 STS Pegasus 4/Processes
- 20:43, 19 November 2020 diff hist +1,681 N STS Pegasus 4/Processes/LNF Unswitched Poly Created page with "<!-- Make sure to add any other relevant categories --> {{#ifeq: {{NAMESPACE}} | Template | | Category:Processes}} {{warning|This page has not been released yet.}} {{Infob..."
- 20:40, 19 November 2020 diff hist +1,723 N STS Pegasus 4/Processes/LNF Switched Poly Created page with "<!-- Make sure to add any other relevant categories --> {{#ifeq: {{NAMESPACE}} | Template | | Category:Processes}} {{warning|This page has not been released yet.}} {{Infob..."
- 20:27, 19 November 2020 diff hist +303 STS Pegasus 4/Processes
- 20:15, 19 November 2020 diff hist +2,415 N STS Pegasus 4/Processes/LNF Si Thinning 2 Created page with "<!-- Make sure to add any other relevant categories --> {{#ifeq: {{NAMESPACE}} | Template | | Category:Processes}} {{warning|This page has not been released yet.}} {{Infob..."
- 20:11, 19 November 2020 diff hist +2,554 N STS Pegasus 4/Processes/LNF Si Thinning 1 Created page with "<!-- Make sure to add any other relevant categories --> {{#ifeq: {{NAMESPACE}} | Template | | Category:Processes}} {{warning|This page has not been released yet.}} {{Infob..."
- 11:09, 19 November 2020 diff hist +1,734 N STS Pegasus 4/Processes/LNF O2 Descum Created page with "<!-- Make sure to add any other relevant categories --> {{#ifeq: {{NAMESPACE}} | Template | | Category:Processes}} {{warning|This page has not been released yet.}} {{Infob..."
- 11:01, 19 November 2020 diff hist +19 STS Pegasus 4/Processes/LNF Ar Descum
- 10:59, 19 November 2020 diff hist +1,589 N STS Pegasus 4/Processes/LNF Ar Descum Created page with "<!-- Make sure to add any other relevant categories --> {{#ifeq: {{NAMESPACE}} | Template | | Category:Processes}} {{warning|This page has not been released yet.}} {{Infob..."
- 10:49, 19 November 2020 diff hist +1,298 STS Pegasus 4/Processes →Process List
- 14:17, 18 November 2020 diff hist -96 STS Pegasus 4/Processes/LNF Oxynitride LF →Procedure
- 14:16, 18 November 2020 diff hist 0 STS Pegasus 4/Processes/LNF Oxynitride LF
- 14:15, 18 November 2020 diff hist +8 STS Pegasus 4/Processes/LNF Oxynitride LF
- 14:13, 18 November 2020 diff hist +20 STS Pegasus 4/Processes/LNF Oxynitride LF
- 14:12, 18 November 2020 diff hist +260 STS Pegasus 4/Processes/LNF Oxynitride LF
- 14:13, 10 November 2020 diff hist +132 STS Pegasus 4/Processes/LNF Recipe 3 →Open area
- 08:59, 10 November 2020 diff hist -1 COVID-19 Protocols →Lab occupancy restrictions
- 08:59, 10 November 2020 diff hist +1 COVID-19 Protocols →Room access and gowning protocols
- 08:58, 10 November 2020 diff hist +4 COVID-19 Protocols →LNF access
- 18:56, 9 November 2020 diff hist +202 STS Pegasus 4/Processes/LNF Recipe 4 →Limitations
- 12:19, 9 November 2020 diff hist +395 EVG 520IS
- 12:18, 9 November 2020 diff hist -13 EVG 510 →Announcements
- 12:17, 9 November 2020 diff hist +461 EVG 510 →Announcements
- 10:23, 9 November 2020 diff hist -33 COVID-19
- 09:50, 27 October 2020 diff hist -76 Sample mounting →Sample mounting handbook
- 14:04, 23 October 2020 diff hist -133 YES-CV200RFS(E) →Announcements
- 08:18, 10 September 2020 diff hist +3 Template:Technology group current
- 08:16, 10 September 2020 diff hist +8 Reactive ion etching
- 08:15, 10 September 2020 diff hist +637 Template:Technology current
- 19:46, 9 September 2020 diff hist +37 Optical lithography →Training modules
- 12:15, 1 September 2020 diff hist +18 Lithography training session
- 17:09, 31 August 2020 diff hist 0 YES-CV200RFS(E) →Maintenance
- 17:07, 31 August 2020 diff hist -564 YES-CV200RFS(E) →Checkout procedure
- 17:07, 31 August 2020 diff hist +185 YES-CV200RFS(E)
