User contributions
10 March 2022
CL200 Megasonic Cleaner
no edit summary
-20
CL200 Megasonic Cleaner
no edit summary
-66
CL200 Megasonic Cleaner
no edit summary
-72
18 February 2022
2 February 2022
16 December 2021
17 November 2021
LNF User:LAM 9400 User Processes/XDev sapphire 3
no edit summary
-23
LNF User:LAM 9400 User Processes/XDev sapphire 3
no edit summary
-98
10 November 2021
8 November 2021
5 November 2021
LAM 9400/Processes/LNF HfO2
Characterization
+43
LAM 9400/Processes/LNF HfO2
no edit summary
+85
LAM 9400/Processes/LNF HfO2
Etch Rates
+34
4 November 2021
2 November 2021
LAM 9400/Processes/LNF HfO2
no edit summary
-3
LAM 9400/Processes/LNF HfO2
no edit summary
+11
LAM 9400/Processes/LNF HfO2
Parameters
+11
LAM 9400/Processes/LNF HfO2
Parameters
-1
LAM 9400/Processes/LNF HfO2
Etch Rates
-1
LAM 9400/Processes/LNF HfO2
Created page with "<!-- Make sure to add any other relevant categories --> {{Infobox process |technology = RIE |material = HfO2 |mask = Photoresist |gases = BCl<sub>3</sub> |created = October 20..."
28 October 2021
Plasmatherm 790
Supported Processes
Plasmatherm 790/Processes/L nit350
Capabilities
-49
Plasmatherm 790/Processes/L nit350
Capabilities
-12
Plasmatherm 790/Processes/L nit200
Capabilities
-12
Plasmatherm 790/Processes/L ox350
Capabilities
+1
Plasmatherm 790/Processes/L ox200
Capabilities
-2
26 October 2021
20 October 2021
13 October 2021
12 October 2021
4 October 2021
29 September 2021
28 September 2021
27 September 2021
24 September 2021
26 August 2021
18 August 2021
5 August 2021
SB-6E Bonder
Checkout procedure
-31
SB-6E Bonder
Maintenance
-474
MJB3-2
Checkout procedure
-104
MA6 Mask Aligner
Checkout procedure
+128
ACS 200 cluster tool
Checkout procedure
-181
MA-BA-6 Mask-Bond Aligner
Checkout procedure
-67