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11:57, 12 September 2019 1000nm gratings low reflection.jpg (file) 220 KB Stepper exposure matrix 1000nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 2... 1
12:01, 12 September 2019 1000nm lines low reflection.jpg (file) 297 KB Stepper exposure matrix 1000nm isolated lines in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS dev... 1
12:08, 12 September 2019 1000nm trenches low reflection.jpg (file) 279 KB Stepper exposure matrix 1000nm isolated trenches in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS d... 1
14:09, 24 November 2014 10020.jpg (file) 136 KB   1
15:21, 29 January 2015 10030.jpg (file) 195 KB   1
12:25, 10 June 2015 10051.jpg (file) 171 KB   1
15:06, 31 July 2015 10061.jpg (file) 95 KB   2
11:23, 26 June 2015 140020.jpg (file) 151 KB   1
11:22, 26 June 2015 140031.jpg (file) 138 KB   1
11:23, 26 June 2015 140041.jpg (file) 155 KB   1
09:18, 13 August 2015 141031.jpg (file) 163 KB   1
08:09, 28 May 2015 142001.jpg (file) 276 KB   1
09:56, 10 December 2014 15000.jpg (file) 174 KB   1
20:06, 17 August 2015 150001.jpg (file) 180 KB   2
09:01, 20 October 2015 171010.jpg (file) 145 KB   2
14:35, 3 October 2015 180011.jpg (file) 168 KB   2
14:37, 25 August 2015 200071.jpg (file) 153 KB   2
14:17, 18 May 2015 21040.jpg (file) 148 KB   2
11:54, 12 September 2019 350nm gratings low reflection.jpg (file) 188 KB Stepper exposure matrix failed 350nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ... 1
11:59, 12 September 2019 350nm lines low reflection.jpg (file) 371 KB Stepper exposure matrix 350nm isolated lines in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS deve... 1
12:07, 12 September 2019 350nm trenches low reflection.jpg (file) 389 KB Stepper exposure matrix 350nm isolated trenches in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS de... 1
11:38, 25 August 2015 40061.jpg (file) 192 KB   2
11:55, 12 September 2019 400nm gratings low reflection.jpg (file) 444 KB Stepper exposure matrix 400nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25... 1
11:59, 12 September 2019 400nm lines low reflection.jpg (file) 494 KB Stepper exposure matrix 400nm isolated lines in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS deve... 1
12:07, 12 September 2019 400nm trenches low reflection.jpg (file) 375 KB Stepper exposure matrix 400nm isolated trenches in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS de... 1
09:54, 18 August 2015 41000.jpg (file) 150 KB   4
12:52, 3 November 2017 50020.jpg (file) 314 KB   3
11:56, 12 September 2019 500nm gratings low reflection.jpg (file) 574 KB Stepper exposure matrix 500nm gratings (50/50 duty cycle) in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25... 1
12:00, 12 September 2019 500nm lines low reflection.jpg (file) 491 KB Stepper exposure matrix 500nm isolated lines in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS deve... 1
12:08, 12 September 2019 500nm trenches low reflection.jpg (file) 344 KB Stepper exposure matrix 500nm isolated trenches in 0.97µm of SPR 955. Substrate is Si, 5nm SiO2, 34nm Si3N4, 5nm SiO2 and should have ~10% reflection at 365nm (couldn't measure this directly). 100C 90 sec softbake, 110C 90 sec PEB, AZ 300 25sec ACS de... 1
12:24, 3 November 2017 50101.jpg (file) 464 KB Reverted to version as of 17:22, 3 November 2017 4
09:58, 8 February 2021 51000.jpg (file) 452 KB   2
10:33, 4 May 2015 53081.jpg (file) 88 KB   1
10:00, 29 July 2015 53091.jpg (file) 233 KB   1
10:04, 3 August 2015 53101.jpg (file) 96 KB   2
13:51, 18 August 2015 53111.jpg (file) 191 KB   2
13:52, 18 August 2015 53121.jpg (file) 184 KB   1
08:31, 25 August 2015 54071.jpg (file) 187 KB   2
21:01, 8 October 2019 59000.jpg (file) 174 KB   1
09:20, 4 May 2015 62040.jpg (file) 150 KB   2
08:45, 10 March 2015 71011.jpg (file) 59 KB   1
12:14, 9 September 2020 Aluminum corrosion on lines.jpg (file) 300 KB   1
17:47, 6 December 2019 BHF SiO2 Etch Undercut SPR 955 DUV.jpg (file) 165 KB 15min BHF etch of SiO2 with SPR 955 mask, 5min in DUV tool 1
10:36, 3 August 2015 CEE Correct Sample.jpg (file) 40 KB   2
14:12, 3 August 2015 CEE Developer recipe name format.png (file) 20 KB xyz 1
13:55, 1 May 2014 CEE Developers.jpg (file) 41 KB   1
10:38, 3 August 2015 CEE Incorrect Sample.jpg (file) 45 KB   3
15:27, 5 November 2014 CMP Strasbaugh 6EC.png (file) 316 KB   1
09:32, 3 April 2020 Crotonic acid.svg (file) 4 KB == Summary == {{Information | Description= Crotonic acid | Source= mediawiki commons | Date= 2020-04-3 | Author= Wrightsh (talk) | Permission= {{PD-chem}} | other_versions= }} Category:Chemical structures 1
16:12, 9 February 2016 Down arrow.svg (file) 698 bytes   1
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