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** [[AMS 2004 Aluminum Nitride Sputter Tool|AMS 2004 Aluminum Nitride Sputter Tool]]
** [[Denton Explorer-14|Denton Explorer-14]]
==Equipment==
The LNF has 4 sputter deposition tools
** [[AMS 2004 Aluminum Nitride Sputter Tool|AMS 2004 Aluminum Nitride Sputter Tool]]
** [[Denton Explorer-14|Denton Explorer-14]]
** [[Lab 18-1|Lab 18-1]]
** [[Lab 18-2|Lab 18-2]]
===Lab 18-1===
