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Plasmatherm 790

19 bytes added, 7 years ago
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<!-- Set the resource ID, 5 digit # found on the scheduler -->
<!-- Set the Process Technology (see subcategories on Equipment page) -->
{{#vardefine:toolid|10030}} {{#vardefine:technology|RIE}} {{resource}}[[Category:PECVD]]
{{infobox equipment
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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