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Veeco Fiji ALD

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|processes = [[https://docs.google.com/spreadsheets/d/e/2PACX-1vTlbqet6aqY0Lde86l1L9EdzkNwu0x-qxeGJqOW0NDqBRIcB8GHyI03OlU8ZO33Qm8bFeU4FBRoKu94/pubhtml?gid=31564933&single=true Supported Processes]]
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The Veeco/Ultratech/Cambfidge Fiji is a plasma or thermal assisted [[atomic layer deposition]] (ALD) tool used to deposit a variety of oxides, nitrides and metals. It is a load locked tool which had has five channels for metal organic precursors, one channel for water and a plasma head with [[Ar|Ar]], [[O2|O<sub>2</sub>]], [[H|H]], and [[N2|N<sub>2</sub>]]
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