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Sputter deposition

45 bytes added, 3 years ago
==Equipment==
The LNF has 5 sputter deposition tools
** [[AMS 2004 Endeavor M1 Aluminum Nitride Sputter Tool|AMS 2004 Endeavor M1 Aluminum Nitride Sputter Tool]]
** [[Denton Explorer-14|Denton Explorer-14]]
** [[Lab 18-1|Lab 18-1]]
** [[PVD 75 Proline|PVD 75]]
===AMS 2004 Endeavor M1 Aluminum Nitride Sputter Tool==={{main|AMS 2004 Endeavor M1 Aluminum Nitride Sputter Tool}}
*Materials deposited: AlN, Al
*The AMS Endeavor M1 tool is designed specifically for Piezoelectric AlN on either 4" or 6" wafers. It is a high temperature process that works only on certain substrates with specific seeding matetrials materials and the handler is only designed for to process both 4" (via 6" carrier) or 6" wafers are this time.
===Denton Explorer===
Administrator, OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser
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