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Sputter deposition

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*Materials deposited: AlN, Al
*The Endeavor M1 tool is designed specifically for Piezoelectric AlN on either 4" or 6" wafers. It is a high temperature process that works only on certain substrates with specific seeding materials and the handler is designed to process both 4" (via 6" carrier) or 6" wafers.
===Denton Explorer===
{{main|Denton Explorer-14}}
*The Denton Explorer is an open-loop 2-source magnetron sputter tool used as a Lab 18 backup for depositing metal films
===Lab 18-1===
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