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Sputter deposition
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4 years ago
→Equipment
==Equipment==
The LNF has 4 sputter deposition tools
** [[Endeavor M1 Aluminum Nitride Sputter Tool|Endeavor M1
Aluminum Nitride
ALN
Sputter Tool]]
** [[Lab 18-1|Lab 18-1]]
** [[Lab 18-2|Lab 18-2]]
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