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Sputter deposition

No change in size, 3 years ago
==Equipment==
The LNF has 4 sputter deposition tools
** [[Endeavor M1 ALN Sputter Tool|Endeavor M1 ALN Sputter ToolEndeavor_M1_AlN_Sputter_Tool]]
** [[Lab 18-1|Lab 18-1]]
** [[Lab 18-2|Lab 18-2]]
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