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==Checkout procedure==
<!-- Describe the checkout procedure # Complete a [[Lithography training session]]. If you have already completed this for the another tool, you do not need to complete it again. For example: --># Read through this page and the [ Standard Operating Procedure] User Manual above.
# Practice with your mentor or another authorized user until you are comfortable with tool operation.
# Complete Accurately complete the SOP quiz [ here]. You may retake as necessary until all answers are correct.# Create a [{{#var:toolid}} Helpdesk Tickethelpdesk ticket] requesting trainingcheckout.# A Authorization will be provided pending demonstration of proper tool engineer will schedule a time for initial training.# Schedule a checkout session with use in the presence of a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
The UV energy at the chuck face is routinely calibrated, so that the energy delivered corresponds to the display on the lamp controller. The energy delivered is 20 mJ/sec at the 405 nm wavelength with an additional 9-10 mJ/sec at the 365 nm wavelength (the 365 nm peak is not calibrated, but is constant in relation to the 405 nm peak). Lamp uniformity is routinely calibrated to within 2-3% across the 75 mm range.
The WEC (Wedge Error Compensation) head is completely rebuilt semi annually and checked weekly and adjusted as needed for proper height and level.
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