OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
2,154
edits
Changes
Jump to navigation
Jump to search
<!-- Set the resource ID, 5 digit # found on the scheduler --> {{#vardefine:toolid|51000}} <!-- Set the Process Technology (see subcategories on Equipment page) --> {{#vardefine:technology|Lithography}} <!--Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals --> {{#vardefine:restriction|24}}
|chemicals =|gases = |overview = [[{{PAGENAME}}#System_overview System overview | System Overviewoverview]]|sop = [[{{PAGENAME}}#Standard_operating_procedure| https://docs.google.com/document/d/1znEkxEo7a1avN68OaWswpK5i7lHbAY4Ew_4dtemibC8/preview SOP]]
<!--A more general description of what the tool is capable of doing.-->
no edit summary
{{infobox equipment
|caption =
|mask =5"
|size =
|processes = [[{{PAGENAME}}/Processes|Supported Processes]]
|userprocesses = [[LNF_User:{{PAGENAME}}_user_processes|User Processes]]
==Capabilities==
* 400nm isolated lines, 500nm gratings and isolated trenches
* 10 mm pieces up to 6" wafers
