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|chemicals = [[HMDS]]
|gases = [[Ammonia]]
|overview = [https://docs.google.com/document/d/1i0a8S2MGmC8Cmw9f3218E69H_soO187EaTTVVP8XMVg/preview [{{PAGENAME}}#System overview | System Overviewoverview]]|sop = [https://docs.google.com/document/d/1wNJSHZsImhCZJ3Ws9QIVE_04OcaK1xYmCr6cKZW9NbrxOPRpTq-64LxvLO2KO4Lik2pz9bC35B81OWjlu0TiF0/preview SOP?usp=sharing User Manual]|processes = [https://docs.google.com/document/d/15AbmT5QVYIX_0gnG2B71kghy8kr_iDptuHUdK9E7818/preview [{{PAGENAME}}#Supported processes | Supported Processes]|maintenance = [https://docs.google.com/document/d/1sa1Yi37izvvHsVQNm1iI46BnbkfbqhXDlC0IC29W4Vg/preview [{{PAGENAME}}#Maintenance | Maintenance]
|manufacturer = [http://www.yieldengineering.com/ Yield Engineering Systems]
|model = 310TA (E)
