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GCA AS200 AutoStep

436 bytes removed, 1 year ago
* Automatic reticle (mask) alignment. Automatic wafer handling for 4" wafers
* Atmospheric compensation system controlled to within 0.1 °C
===Substrate requirements===
* 10 mm pieces up to 6" diameter
* Substrate thicknesses (with existing chucks) 175-675 μm (the range from 400-475 μm thick may not work with existing chucks)
* 4" Si substrates can be autoloaded and prealigned. Various other substrates permitted, but must be manually loaded
* Mounting not necessary unless one is trying to achieve a useable thickness. Make a helpdesk ticket for assistance if needed
===Material restrictions===
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