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<!-- Set the resource ID, 5 digit # found on the scheduler -->{{#vardefine:toolid|85051}}<!-- Set the Process Technology (see subcategories on Equipment page) -->{{#vardefine:technology|Metrology}}<!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->{{#vardefine:restriction|4}}
{{infobox equipment
|caption =
==Checkout Procedure==
<!-- Describe the checkout procedure for the tool. For example: -->
# Read through this page and the Equipment Manual aboveand the [https://www.dropbox.com/s/sx25bro4rxpi08y/2015-05%20SEM%20at%20LNF.pdf?dl=0 SEM tech talk slides].
# If your mentor is authorized on the system, practice the tool with them. Otherwise make a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} helpdesk ticket] to schedule an initial training.
# Schedule a time for a checkout: