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Sputter deposition

149 bytes added, 8 months ago
==Materials==
The following materials can be deposited via Magnetron sputter deposition at the LNF. Please note some materials are rarely used in these cases, additional work will be needed to validate process conditions and the rate of deposition.
*[[Aluminum|Aluminum(Al)]]
*[[Aluminum oxide|Aluminum oxide(Al2O3)]]
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