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Plasmatherm 790

16 bytes added, 7 years ago
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# Schedule a checkout session with a tool engineer via the helpdesk ticket system. If this checkout is successful, the engineer will authorize you on the tool.
==Tool QualificationMaintenance== Every other week a light cleaning is performed on the tool. A 5 min etch with m_si_o_1 is performed on a 4" oxide waferas a qualification run. The results can be seen below.
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