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Plasmatherm 790
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8 years ago
→Material Restrictions
====Left Chamber====
{{#widget:ApprovedMaterials|toolid={{#var:toolid}}1|header=N}}
====Right Chamber====
The right chamber has the same restrictions as the left except polymers (such as photoresist) are not allowed unless their melting temperature is significantly higher then the process temperature.
==Supported Processes==
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