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2,152
edits
Changes
** [[Helium|He]] - 101 sccm
** [[Oxygen|O<sub>2</sub>]] - 100 sccm
** [[Sulfur Hexafluoridehexafluoride|SF<sub>6</sub>]] - 52 sccm
* PECVD Gases
** [[Methane|CH<sub>4</sub>]] - 72 sccm
** [[Helium|He]] - 500 sccm
** [[Nitrogen|N<sub>2</sub>]] - 2000 sccm
** [[Nitrous Oxideoxide|N<sub>2</sub>O]] - 497 sccm
** [[Ammonia|NH<sub>3</sub>]] - 3 sccm
** [[Silane|SiH<sub>4</sub>]] - 6 sccm