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{{lead too short}}
{{#vardefine:toolid|10030}} {{#vardefine:technology|RIE}} {{resource}} {{#vardefine:restriction|3}} [[Category:PECVD]] {{infobox equipment
|restriction = [[{{PAGENAME}}#Material_Restrictions|Metals]]
|materials = [[Si]], [[SiO2|SiO<sub>2</sub>]]
