Changes

Plasmatherm 790

7 bytes removed, 8 years ago

→‎Hardware Details

* Pressure

** RIE: 5 - ~~300 mTorr~~1 Torr** PECVD: 50 - ~~2000 mTorr~~2 Torr

* Chuck

OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors

2,181

edits

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