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Plasmatherm 790

7 bytes removed, 6 years ago
* Pressure
** RIE: 5 - 300 mTorr1 Torr** PECVD: 50 - 2000 mTorr2 Torr
* Chuck
OnlineAccess, PhysicalAccess, Staff, StoreManager, StoreUser, Bureaucrats, Interface administrators, Administrators, Widget editors
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