Spinner CEE Apogee
|Spinner CEE Apogee|
|Sample Size||pieces up to 6" wafers|
|Chemicals Used||Acetone, IPA|
|Supported Processes||Supported Processes|
The Spinner CEE Apogee is a fully programmable, manual dispense, photoresist spinner located in the main cleanroom at the LNF. It can accept pieces, 4" and 6" wafers. It is located in 1440C.
This tool will be released soon. Please review the SOP, take the access quiz, and take the Spinner CEE Apogee Online Training. The online training will substitute for an initial training.
- Available Photoresists
- SPR 220 (3.0)
- Allowed Photoresists
- Up to 6K rpm spin rates
- Hot plate maintained at 115°C
- From 10x10 mm pieces up to 150 mm (6 inch) wafers
- No substrate material requirements
- Available Chucks
- 6" Chuck (Ø 3.75")
- 4" Chuck (Ø 2.25")
- Large Piece Chuck (Ø 0.75")
- Small Piece Chuck (Ø 0.25" - chuck ; Ø 0.375" - O-ring)
The Spinner CEE Apogee is designated as a General class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email email@example.com for any material requests or questions.
There are 10 recipe slots in the software, used as follows:
- 8 fixed spin recipes, 1 stripping recipe, 1 custom recipe
- 4 recipes (1000-4000 rpm) for thin resists (e.g. SPR 220 3.0)
- 4 recipes (1000-4000 rpm) for thick resists (e.g. KMPR 1010)
- Only the Custom recipe is allowed to be changed. Instructions on how to do so can be found in the SOP.
More information on the recipe details can be found in the standard processes document. For more information on photoresist spinning and recommended lithography processes, please read the Lithography page. For information on a specific photoresist, please check the datasheet.
Standard Operating Procedure
- Complete a Lithography training session. If you have already completed this for another tool, you do not need to complete it again.
- Take the online training and read through the SOP.
- Accurately complete the checkout quiz. You may retake as necessary until all answers are correct.
- Schedule a time for a checkout:
- Create a helpdesk ticket for final confirmation of your checkout appointment.
- Authorization will be provided pending demonstration of proper tool use in the presence of a tool engineer.
The bowl, chucks, and hotplate are cleaned each week during lab clean. The protective lining in the bowl is replaced as necessary.
In the event of a power bump, users may run the turn the tool on using the power button.