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Wafer bonding refers to attaching two or more substrates of material such as glass or silicon, to each other by means of various chemical and physical effects. Wafer bonding is mainly used in MEMS, where sensor components are encapsulated in the application. The most common types of wafer bonding are adhesive, anodic, eutectic, fusion, glass frit, and metalic diffusion.

Contents

Technologies

Here is where you describe technologies within the group.

Technology 1

Template:Adhesive bonding Describe the technology, particularly including why you might use it over another within the same group.

Technology 2

Template:Anodic bonding Here's another technology in that group.

Technology 3

Template:Eutectic bonding Here's another technology in that group.

Technology 4

Template:Fusion bonding Here's another technology in that group.

Technology 5

Template:Glass frit Here's another technology in that group.

Technology 6

Template:Metallic diffusion bonding Here's another technology in that group.

Figures of Merit

What is important to look for in the technology? Etch/dep rate? Resolution?

FOM 1

Subheadings are optional.

Applications

How is this technology used in nanofabrication and what types of devices/research areas is it useful in?

Equipment

Specific equipment for each technology can be found on its page above. Additionally, below is a list of all metrology equipment in the LNF:


See also

Other related wiki pages

References


Further reading

  • Other stuff, e.g. technology workshop slides
  • External links (can be in another section below, if appropriate)