Sulfur hexafluoride
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Sulfur Hexafluoride (SF6) is a gas used in reactive ion etching. It has a high fluorine content which makes it a very effective silicon etchant.
This page has not been released yet. |
Sulfur Hexafluoride (SF6) is a gas used in reactive ion etching. It has a high fluorine content which makes it a very effective silicon etchant.