Surface activation

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Surface activation
Technology Details
Other Names %@@@@@%,  %other names and abbreviations, separated by commas%
Technology Other Technologies, Soft Lithography
Equipment Glen 1000P Plasma Cleaner, NP12 nanoPREP
Materials PDMS, Si wafer, glass wafer
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Surface activation (%@@@@@%) is Write a brief description of what this technology is used for and how it works here.

See Reactive ion etching and Plasma etching for an example.

Method of operation

Describe how the technology works.

Applications

How is this technology used in nanofabrication and what types of devices/research areas is it useful in?

Parameters

Here we describe what parameters are of importance in this technology (e.g. power, temperature...). May not be relevant to some technologies.

Parameter 1

Main article: Parameter 1

You may want to make a separate sub-page or article specifically for a parameter if this is longer than, say a paragraph or two. If not, get rid of the {{main|xyz}} below the heading.

Subtechnology 1

Main article: Subtechnology 1

Describe any sub-technologies of this technology.

Materials

Optional description of materials that can be processed by technology. I think the best example of where this comes in handy would be with LPCVD describing the difference between HTO and LTO.

Equipment

If this is a "main category" for equipment (i.e. you categorized that equipment page to be this technology), you should list the equipment here with a brief description of that tool's capabilities. Seriously, though, just check out the RIE page.

Equipment 1

Main article: Equipment 1

Brief description of that piece of equipment.

Complete tool list


See also

Other related wiki pages

References


Further reading