Tantalum

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A description & relevant information for this material need to be added. If it is not grown or deposited in the lab make sure this in mentioned here.

Equipment

Process technologies that can be used to deposit/pattern this material. If this is a substrate, refer to what tool/process restrictions there may be and possibly remove the following sub-sections.

Deposition Equipment

• Tools in the LNF for depositing this material.

Etching Equipment

• Tools in the LNF for etching this material.

Characterization Equipment

• Metrology/Characterization equipment available in the LNF for measuring physical, optical, and surface properties of this material.

Applications

• Discuss common uses/applications for this material. Why this materials is used in the LNF?

Processes

Deposition Processes

• List of technologies for depositing this material and relevant process information specific to this material associated with this equipment/type of process.

Etching Processes

• List of technologies for etching/pattering this material and relevant process information specific to this material associated with this equipment/type of process.

Characterization Processes

• List of techniques for metrology/characterization can be used with this material and relevant process information specific to this material associated with this equipment/type of process.

Technical Data

• Charts or specific LNF related data for this material.

References

• Citations/references for this material, review articles. If possible, examples of users publications which includes the material.