Tempress S2T2 - Nitride-HTO 4"

Tempress S2T2 - Nitride-HTO 4"
Equipment Details
Technology	LPCVD
Materials Restriction	CMOS Clean
Sample Size	Pieces up to 150 mm (6")
Gases Used	N2, SiH2Cl2, N2O, NH3
Equipment Manual
Overview	System Overview
Operating Procedure	SOP
Supported Processes	Nitride, HTO
Maintenance	Maintenance

The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. HTO (High Temperature Oxide), and Nitride, are formed by using a process called LPCVD, Low Pressure Chemical Vapor Deposition. Chemical vapor deposition forms thin films on the surface of a substrate by thermal decomposition and/or reaction of gaseous compounds. The desired material is deposited directly from the gas phase onto the surface of the wafer. The important factors are gas ratio, temperature, and pressure.

Announcements

• New wands - Vespel is a softer material and should do less damage to double sided polished wafers. The drawback to Vespel is that it can't take as much heat as a quartz wand tip. The maximum sustainable temperature for Vespel is 288C. So make sure you allow enough time for the wafers to cool prior to handling them. Once the boat has traveled all the way out of the tube you will need at least 10 minutes for the storage tube and a minimum of 15 minutes for tubes

Capabilities

• Silicon Nitride
• High Temperature Oxide (HTO)
• Low Stress Nitride (LSN)
• Maximum Thickness
  • Nitride = 7000Å
  • HTO = 2µm
  • LSN = 2µm

System overview

Hardware details

• Maximum Temperature - 900°C
• N₂ - Maximum flow 10 slpm
• N₂ - Maximum flow 1000 sccm
• SiH₂Cl₂ - Maximum flow 200 sccm
• N₂O - Maximum flow 500 sccm
• NH₃ - Maximum flow 500 sccm

Substrate requirements

• Silicon only
• 150 mm (6") only
• Can process up to 25, 150 mm (6") wafers

All samples must go through the RCA Pre-Furnace clean procedure before being processed in the furnace

Material restrictions

The Tempress S2T2 - Nitride-HTO 4" is designated as a CMOS Clean class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.

Approved materials

Supported processes

• Silicon Nitride
• High Temperature Oxide (HTO)

Process details

• Process recipe overview

Characterization data

• Nitride
• HTO

Standard operating procedure

• Quick reference SOP

Checkout procedure

1. Create a Help desk Ticket requesting training.
2. LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
3. Schedule a checkout session with a tool engineer via the existing Helpdesk ticket. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

• Paddle - cleaned every 3-6µm of accumulated deposition.
• Boats, and dummy wafers are replaced every 3-6 µm of accumulated deposition.
• Tube is replaced at 100µm of accumulated deposition.