Difference between revisions of "Tempress S2T2 - Nitride-HTO 6""

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{{#vardefine:toolid|30081}}{{#vardefine:technology|LPCVD}}{{#vardefine:restriction|1}}{{infobox equipment
{{#vardefine:toolid|30081}}
 
<!-- Set the Process Technology (see subcategories on Equipment page) -->
 
{{#vardefine:technology|LPCVD}}
 
<!-- Set the Material Restriction Level: 1 = CMOS Clean, 2 = Semi-Clean, 3 = Metals -->
 
{{#vardefine:restriction|1}}
 
{{infobox equipment
 
 
|caption =  
 
|caption =  
 
|materials =  
 
|materials =  
 
|mask =
 
|mask =
|size = Pieces up to 150mm (6")
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|size = Pieces up to 150 mm (6")
 
|chemicals =
 
|chemicals =
 
|gases = [[Nitrogen|N<sub>2</sub>]], [[Dichlorosilane|SiH<sub>2</sub>Cl<sub>2</sub>]], [[Nitrous Oxide|N<sub>2</sub>O]], [[Ammonia|NH<sub>3</sub>]]
 
|gases = [[Nitrogen|N<sub>2</sub>]], [[Dichlorosilane|SiH<sub>2</sub>Cl<sub>2</sub>]], [[Nitrous Oxide|N<sub>2</sub>O]], [[Ammonia|NH<sub>3</sub>]]
|overview = [[{{PAGENAME}}#System_Overview | System Overview]]
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|overview = [[{{PAGENAME}}#System_overview | System Overview]]
 
|sop = [https://link.to.google.doc/preview SOP]
 
|sop = [https://link.to.google.doc/preview SOP]
|processes = [[Nitride]], [[HTO]]
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|processes = [[{{PAGENAME}}#Supported_processes|Nitride, HTO]]
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
|maintenance = [[{{PAGENAME}}#Maintenance | Maintenance]]
 
}}
 
}}
 
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The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, [[MEMS]], and solar devices. [[HTO]] (High Temperature Oxide), and [[Nitride]], are formed by using a process called [[LPCVD]], Low Pressure Chemical Vapor Deposition. Chemical vapor deposition forms thin films on the surface of a substrate by thermal decomposition and/or reaction of gaseous compounds. The desired material is deposited directly from the gas phase onto the surface of the wafer. The important factors are gas ratio, temperature, and pressure.
{{warning|This page has not been released yet.}}
 
 
 
The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, [[MEMS]], and solar devices. [[HTO]] ([[High Temperature Oxide]]), and [[Nitride]], are formed by using a process called [[LPCVD]], Low Pressure Chemical Vapor Deposition. Chemical vapor deposition forms thin films on the surface of a substrate by thermal decomposition and/or reaction of gaseous compounds. The desired material is deposited directly from the gas phase onto the surface of the wafer. The important factors are gas ratio, temperature, and pressure.
 
  
 
==Announcements==
 
==Announcements==
* HTO is not available at this time.
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* New wands - Vespel is a softer material and should do less damage to double sided polished wafers. The drawback to Vespel is that it can't take as much heat as a quartz wand tip. The maximum sustainable temperature for Vespel is 288C. So make sure you allow enough time for the wafers to cool prior to handling them. Once the boat has traveled all the way out of the tube you will need at least 10 minutes for the storage tube and a minimum of 15 minutes for tubes
  
 
==Capabilities==
 
==Capabilities==
* [[Nitride]]
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* [[Silicon Nitride]]
* [[HTO]] (High Temperature Oxide)
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* [[Silicon Dioxide|High Temperature Oxide]] (HTO)
 
* Maximum Thickness
 
* Maximum Thickness
** Nitride = 7000 Å
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** Nitride = 7000Å
** HTO = 1.2 µm
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** HTO = 2µm
  
==System Overview==
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==System overview==
===Hardware Details===
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===Hardware details===
 
* Maximum Temperature - 900°C
 
* Maximum Temperature - 900°C
 
* [[Nitrogen|N<sub>2</sub>]] - Maximum flow 10 slpm
 
* [[Nitrogen|N<sub>2</sub>]] - Maximum flow 10 slpm
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* [[Ammonia|NH<sub>3</sub>]] - Maximum flow 500 sccm
 
* [[Ammonia|NH<sub>3</sub>]] - Maximum flow 500 sccm
  
===Substrate Requirements===
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===Substrate requirements===
 
* [[Silicon]] only
 
* [[Silicon]] only
* Pieces up to 150mm (6")
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* 150 mm (6") only
* Can process up to 25, 150mm (6") wafers
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* Can process up to 25, 150 mm (6") wafers
 
{{note|All samples must go through the [[RCA Bench 81|RCA Pre-Furnace clean]] procedure before being processed in the furnace|reminder}}
 
{{note|All samples must go through the [[RCA Bench 81|RCA Pre-Furnace clean]] procedure before being processed in the furnace|reminder}}
  
===Material Restrictions===
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===Material restrictions===
 
{{material restrictions}}
 
{{material restrictions}}
  
==Supported Processes==  
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==Supported processes==  
* [[Nitride]]
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* [[Silicon nitride]]
* [[HTO]] (High Temperature Oxide)
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* [[Silicon dioxide|High temperature oxide]] (HTO)
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===Process Details===
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===Process details===
* [https://docs.google.com/spreadsheets/d/1WlGMWf8A5UORCKt6Syd8FexKJEf4XO5nTZNRhw8uNeA/edit#gid=1942938288 Process recipe overview]
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* [https://docs.google.com/spreadsheets/d/1WlGMWf8A5UORCKt6Syd8FexKJEf4XO5nTZNRhw8uNeA/preview#gid=1942938288 Process recipe overview]
  
===Characterization Data===
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===Characterization data===
* [https://docs.google.com/spreadsheets/d/1ahvPO00KKMVTXTjIc2tIQTEDTGBvwWDuQ60ZjzSC7Hc/edit#gid=143400956 Nitride]
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* [https://docs.google.com/spreadsheets/d/1eu5-BpDr2DPlyofkOw1qghFxmCy0WwNeujBKbWFS28Y/preview#gid=335166449 Nitride]
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* [https://docs.google.com/spreadsheets/d/1Up5jobqBAn4gKFfAM6Q42QKqKBcKIZqzX_a3GuEhb-E/preview#gid=6113289 HTO]
  
==Standard Operating Procedure==
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==Standard operating procedure==
* [https://docs.google.com/document/d/1KsEwsDQHZNHiebMxUfzvoDpNchwxNPlrExVOxUiI9O4/edit Standard operating procedure]
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* [https://docs.google.com/document/d/16lkegfHFrnAW0NsSYvv-F9uCWbcXKwwDLV_8H20rW6s/preview Quick reference SOP]
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* [https://docs.google.com/document/d/12iBrxud7Ge4Pw6b4us1srWDu0t42nBhhx96OBM5pmeg/edit?usp=sharing detailed SOP]
  
==Checkout Procedure==
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==Checkout procedure==
# Read the Standard Operating Procedure above.
 
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Help desk Ticket] requesting training.
 
# Create a [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Help desk Ticket] requesting training.
# A process engineer will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
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# LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
# Schedule a checkout session with a tool engineer via the [http://ssel-sched.eecs.umich.edu/sselScheduler/ResourceContact.aspx?tabindex=3&path=0:0:0:{{#var:toolid}} Help desk Ticket] system. If this checkout is successful, the engineer will authorize you on the tool.
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# Schedule a checkout session with a tool engineer via the existing Helpdesk ticket. If this checkout is successful, the engineer will authorize you on the tool.
  
 
==Maintenance==  
 
==Maintenance==  
* Paddle - cleaned every 3-6 µm of accumulated deposition
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* Paddle - cleaned every 3-6µm of accumulated deposition.
* Boats, and dummy wafers are cleaned, or replaced every 3-6 µm of accumulated deposition
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* Boats, and dummy wafers are replaced every 3-6 µm of accumulated deposition.
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* Tube is replaced at 100µm of accumulated deposition.

Latest revision as of 12:45, 12 August 2022

Tempress S2T2 - Nitride-HTO 6"
30081.jpg
Equipment Details
Technology LPCVD
Materials Restriction CMOS Clean
Sample Size Pieces up to 150 mm (6")
Gases Used N2, SiH2Cl2, N2O, NH3
Equipment Manual
Overview System Overview
Operating Procedure SOP
Supported Processes Nitride, HTO
Maintenance Maintenance


The Tempress diffusion system is a modular horizontal furnace designed to process silicon wafers as part of the manufacturing technology of semiconductor, optical, MEMS, and solar devices. HTO (High Temperature Oxide), and Nitride, are formed by using a process called LPCVD, Low Pressure Chemical Vapor Deposition. Chemical vapor deposition forms thin films on the surface of a substrate by thermal decomposition and/or reaction of gaseous compounds. The desired material is deposited directly from the gas phase onto the surface of the wafer. The important factors are gas ratio, temperature, and pressure.

Announcements

  • New wands - Vespel is a softer material and should do less damage to double sided polished wafers. The drawback to Vespel is that it can't take as much heat as a quartz wand tip. The maximum sustainable temperature for Vespel is 288C. So make sure you allow enough time for the wafers to cool prior to handling them. Once the boat has traveled all the way out of the tube you will need at least 10 minutes for the storage tube and a minimum of 15 minutes for tubes

Capabilities

System overview

Hardware details

  • Maximum Temperature - 900°C
  • N2 - Maximum flow 10 slpm
  • N2 - Maximum flow 1000 sccm
  • SiH2Cl2 - Maximum flow 200 sccm
  • N2O - Maximum flow 500 sccm
  • NH3 - Maximum flow 500 sccm

Substrate requirements

  • Silicon only
  • 150 mm (6") only
  • Can process up to 25, 150 mm (6") wafers
All samples must go through the RCA Pre-Furnace clean procedure before being processed in the furnace

Material restrictions

The Tempress S2T2 - Nitride-HTO 6" is designated as a CMOS Clean class tool. Below is a list of approved materials for the tool. Approved means the material is allowed in the tool under normal circumstances. If a material is not listed, please create a helpdesk ticket or email info@lnf.umich.edu for any material requests or questions.


Supported processes


Process details

Characterization data

Standard operating procedure

Checkout procedure

  1. Create a Help desk Ticket requesting training.
  2. LNF staff will schedule a time for initial training. After completing training the user can attempt a checkout session. It may be necessary for some users to participate in more than one training session, prior to attempting check out.
  3. Schedule a checkout session with a tool engineer via the existing Helpdesk ticket. If this checkout is successful, the engineer will authorize you on the tool.

Maintenance

  • Paddle - cleaned every 3-6µm of accumulated deposition.
  • Boats, and dummy wafers are replaced every 3-6 µm of accumulated deposition.
  • Tube is replaced at 100µm of accumulated deposition.